Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064037 | Immersion exposure apparatus and device manufacturing method with no liquid recovery during exposure | Hiroyuki Nagasaka, Susumu Makinouchi | 2011-11-22 |
| 7941232 | Control method, control system, and program | Shinichi Okita | 2011-05-10 |