Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064037 | Immersion exposure apparatus and device manufacturing method with no liquid recovery during exposure | Hiroyuki Nagasaka, Yuuki Ishii | 2011-11-22 |
| 7932996 | Exposure apparatus, exposure method, and device fabrication method | Motokatsu Imai | 2011-04-26 |