Issued Patents 2011
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8069816 | Coating film processing method and apparatus | Kousuke Yoshihara | 2011-12-06 |
| 8037890 | Substrate cleaning device and substrate cleaning method | Hideharu Kyouda, Tetsu Kawasaki, Satoru Shimura | 2011-10-18 |
| 8029624 | Rinse method and developing apparatus | Kousuke Yoshihara, Junji Nakamura, Hirofumi Takeguchi | 2011-10-04 |
| 8026048 | Developing apparatus and developing method | Atsushi Ookouchi, Hirofumi Takeguchi, Hideharu Kyouda, Kousuke Yoshihara | 2011-09-27 |
| 8001983 | Cleaning apparatus, coating and developing apparatus, and cleaning method | Masahiro Fukuda | 2011-08-23 |
| 7959988 | Coating film forming apparatus and method | Yasushi Takiguchi, Akihiro Fujimoto, Hideharu Kyouda, Junichi Kitano, Osamu Miyahara +1 more | 2011-06-14 |
| 7924402 | Exposure apparatus and device manufacturing method | Hiroyuki Nagasaka, Osamu Hirakawa | 2011-04-12 |
| 7918182 | Developing device and developing method | Kousuke Yoshihara, Hideharu Kyouda, Hirofumi Takeguchi, Atsushi Ookouchi | 2011-04-05 |
| 7896254 | Temperature regulation method and system for low flow rate liquid | Hiroyasu Goto, Masahiro Fukuda | 2011-03-01 |
| 7896562 | Developing method, developing apparatus and storage medium | Hirofumi Takeguchi, Atsushi Ookouchi, Kousuke Yoshihara | 2011-03-01 |