Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075730 | Apparatus for manufacturing a semiconductor device | Kazuhiro Kubota, Ryuichi Asako, Seiichi Takayama | 2011-12-13 |
| 8037890 | Substrate cleaning device and substrate cleaning method | Taro Yamamoto, Hideharu Kyouda, Tetsu Kawasaki | 2011-10-18 |