Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075730 | Apparatus for manufacturing a semiconductor device | Satoru Shimura, Ryuichi Asako, Seiichi Takayama | 2011-12-13 |
| 8048687 | Processing method for recovering a damaged low-k film of a substrate and storage medium | Wataru Shimizu, Daisuke Hayashi | 2011-11-01 |
| 8021564 | Method for detecting an end point of resist peeling, method and apparatus for peeling resist, and computer-readable storage medium | Isamu Sakuragi | 2011-09-20 |
| 7922865 | Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator | Koji Miyata, Jun Hirose, Akira Kodashima, Shigeki Tozawa, Yuki Chiba | 2011-04-12 |
| 7902806 | Load control unit | Hiroo Yabe, Kazuya Tsubaki, Masato Sasahara | 2011-03-08 |