Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012880 | Method of manufacturing semiconductor device | — | 2011-09-06 |
| 7922865 | Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator | Koji Miyata, Jun Hirose, Akira Kodashima, Shigeki Tozawa, Kazuhiro Kubota | 2011-04-12 |