Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7922865 | Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator | Koji Miyata, Jun Hirose, Shigeki Tozawa, Kazuhiro Kubota, Yuki Chiba | 2011-04-12 |
| 7883579 | Substrate processing apparatus and lid supporting apparatus for the substrate processing apparatus | Shinichi Miyano, Takehiro Kato | 2011-02-08 |