Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7922865 | Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator | Koji Miyata, Jun Hirose, Akira Kodashima, Kazuhiro Kubota, Yuki Chiba | 2011-04-12 |