Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075730 | Apparatus for manufacturing a semiconductor device | Satoru Shimura, Kazuhiro Kubota, Seiichi Takayama | 2011-12-13 |
| 8058153 | Method for recovering damage of low dielectric insulating film for manufacturing semiconductor device | Yusuke Ohsawa | 2011-11-15 |
| 7902077 | Semiconductor device manufacturing method that recovers damage of the etching target while supplying a predetermined recovery gas | Kaoru Maekawa, Yasushi Fujii | 2011-03-08 |