Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071920 | Planar heater | Kazuhiko Shimanuki | 2011-12-06 |
| 8048687 | Processing method for recovering a damaged low-k film of a substrate and storage medium | Wataru Shimizu, Kazuhiro Kubota | 2011-11-01 |
| 8038836 | Plasma processing apparatus | — | 2011-10-18 |
| 8034212 | Magnetron plasma processing apparatus | Hidenori Sato | 2011-10-11 |
| 8003920 | Substrate processing apparatus | Morihiro Takanashi | 2011-08-23 |
| 7991058 | OFDM reception device | Koji Setoh, Ippei Kanno, Akira Kisoda, Ryosuke Mori, Tetsuya Yagi +1 more | 2011-08-02 |
| 7959734 | Substrate mounting structure and substrate processing apparatus | — | 2011-06-14 |
| 7865218 | Receiving device, integrated circuit, program, and receiving method | Noritaka IGUCHI, Ryosuke Mori, Tetsuya Yagi, Koji Setoh, Ippei Kanno | 2011-01-04 |