Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083959 | Substrate processing method, substrate processing system, and computer-readable storage medium | Junichi Kitano, Osamu Miyahara, Kenji Tsutsumi | 2011-12-27 |
| 8037890 | Substrate cleaning device and substrate cleaning method | Taro Yamamoto, Tetsu Kawasaki, Satoru Shimura | 2011-10-18 |
| 8026048 | Developing apparatus and developing method | Atsushi Ookouchi, Taro Yamamoto, Hirofumi Takeguchi, Kousuke Yoshihara | 2011-09-27 |
| 8010221 | Cleaning apparatus and method for immersion light exposure | Kouichi Hontake, Masashi Enomoto | 2011-08-30 |
| 7959988 | Coating film forming apparatus and method | Taro Yamamoto, Yasushi Takiguchi, Akihiro Fujimoto, Junichi Kitano, Osamu Miyahara +1 more | 2011-06-14 |
| 7926441 | Substrate treatment method, coating treatment apparatus, and substrate treatment system | Kenji Tsutsumi, Junichi Kitano, Osamu Miyahara | 2011-04-19 |
| 7918182 | Developing device and developing method | Taro Yamamoto, Kousuke Yoshihara, Hirofumi Takeguchi, Atsushi Ookouchi | 2011-04-05 |