Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083959 | Substrate processing method, substrate processing system, and computer-readable storage medium | Hideharu Kyouda, Junichi Kitano, Osamu Miyahara | 2011-12-27 |
| 8040543 | Instruction file execution device, instruction file execution method and job flow system | Yasuyuki Shimizu, Hitoshi Tsushima, Takashi Hirata, Takayuki Asako, Takuya Honda +2 more | 2011-10-18 |
| 7959988 | Coating film forming apparatus and method | Taro Yamamoto, Yasushi Takiguchi, Akihiro Fujimoto, Hideharu Kyouda, Junichi Kitano +1 more | 2011-06-14 |
| 7926441 | Substrate treatment method, coating treatment apparatus, and substrate treatment system | Junichi Kitano, Osamu Miyahara, Hideharu Kyouda | 2011-04-19 |