Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083959 | Substrate processing method, substrate processing system, and computer-readable storage medium | Hideharu Kyouda, Junichi Kitano, Kenji Tsutsumi | 2011-12-27 |
| 8054443 | Developing method and developing apparatus | Junichi Kitano, Shinya Wakamizu | 2011-11-08 |
| 7968278 | Rinse treatment method and development process method | Yasuhiro Takaki, Keiichi Tanaka, Shinya Wakamizu, Takashi Terada | 2011-06-28 |
| 7959988 | Coating film forming apparatus and method | Taro Yamamoto, Yasushi Takiguchi, Akihiro Fujimoto, Hideharu Kyouda, Junichi Kitano +1 more | 2011-06-14 |
| 7926441 | Substrate treatment method, coating treatment apparatus, and substrate treatment system | Kenji Tsutsumi, Junichi Kitano, Hideharu Kyouda | 2011-04-19 |