Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083959 | Substrate processing method, substrate processing system, and computer-readable storage medium | Hideharu Kyouda, Osamu Miyahara, Kenji Tsutsumi | 2011-12-27 |
| 8053180 | Developing method and developing unit | Yuko Ono | 2011-11-08 |
| 8054443 | Developing method and developing apparatus | Osamu Miyahara, Shinya Wakamizu | 2011-11-08 |
| 7977039 | Rinse treatment method, developing treatment method and developing apparatus | Takeshi Shimoaoki | 2011-07-12 |
| 7959988 | Coating film forming apparatus and method | Taro Yamamoto, Yasushi Takiguchi, Akihiro Fujimoto, Hideharu Kyouda, Osamu Miyahara +1 more | 2011-06-14 |
| 7926441 | Substrate treatment method, coating treatment apparatus, and substrate treatment system | Kenji Tsutsumi, Osamu Miyahara, Hideharu Kyouda | 2011-04-19 |
| 7924396 | Coating/developing apparatus and pattern forming method | Hisashi Kawano, Hitoshi Kosugi, Koichi Hontake, Masashi Enomoto | 2011-04-12 |