Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8010221 | Cleaning apparatus and method for immersion light exposure | Kouichi Hontake, Hideharu Kyouda | 2011-08-30 |
| 7924396 | Coating/developing apparatus and pattern forming method | Hisashi Kawano, Junichi Kitano, Hitoshi Kosugi, Koichi Hontake | 2011-04-12 |
| 7884281 | Photoelectric transfer material, manufacturing method thereof, photoelectric transfer element and manufacturing method thereof | Myung-Seok Choi, Yoshiaki Kobuke, Akiharu Satake | 2011-02-08 |