AF

Akihiro Fujimoto

TL Tokyo Electron Limited: 2 patents #132 of 712Top 20%
Overall (2011): #114,177 of 364,097Top 35%
2
Patents 2011

Issued Patents 2011

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
7959988 Coating film forming apparatus and method Taro Yamamoto, Yasushi Takiguchi, Hideharu Kyouda, Junichi Kitano, Osamu Miyahara +1 more 2011-06-14
7891365 Nozzle cleaning apparatus, nozzle cleaning method, and a computer-readable storage medium storing nozzle cleaning program Takeshi Hirao, Yasutaka Souma 2011-02-22