YS

Yasutaka Souma

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #125,989 of 364,097Top 35%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7891365 Nozzle cleaning apparatus, nozzle cleaning method, and a computer-readable storage medium storing nozzle cleaning program Takeshi Hirao, Akihiro Fujimoto 2011-02-22