Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8069816 | Coating film processing method and apparatus | Taro Yamamoto | 2011-12-06 |
| 8043657 | Coating treatment method | Tomohiro Iseki | 2011-10-25 |
| 8029624 | Rinse method and developing apparatus | Junji Nakamura, Hirofumi Takeguchi, Taro Yamamoto | 2011-10-04 |
| 8026048 | Developing apparatus and developing method | Atsushi Ookouchi, Taro Yamamoto, Hirofumi Takeguchi, Hideharu Kyouda | 2011-09-27 |
| 7918182 | Developing device and developing method | Taro Yamamoto, Hideharu Kyouda, Hirofumi Takeguchi, Atsushi Ookouchi | 2011-04-05 |
| 7906173 | Resist coating method and resist coating apparatus | Tomohiro Iseki | 2011-03-15 |
| 7901514 | Substrate cleaning method and developing apparatus | Junji Nakamura, Kentaro Yamamura, Fumiko Iwao, Hirofumi Takeguchi | 2011-03-08 |
| 7896562 | Developing method, developing apparatus and storage medium | Taro Yamamoto, Hirofumi Takeguchi, Atsushi Ookouchi | 2011-03-01 |