Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029624 | Rinse method and developing apparatus | Kousuke Yoshihara, Junji Nakamura, Taro Yamamoto | 2011-10-04 |
| 8026048 | Developing apparatus and developing method | Atsushi Ookouchi, Taro Yamamoto, Hideharu Kyouda, Kousuke Yoshihara | 2011-09-27 |
| 7918182 | Developing device and developing method | Taro Yamamoto, Kousuke Yoshihara, Hideharu Kyouda, Atsushi Ookouchi | 2011-04-05 |
| 7901514 | Substrate cleaning method and developing apparatus | Junji Nakamura, Kousuke Yoshihara, Kentaro Yamamura, Fumiko Iwao | 2011-03-08 |
| 7896562 | Developing method, developing apparatus and storage medium | Taro Yamamoto, Atsushi Ookouchi, Kousuke Yoshihara | 2011-03-01 |