Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067732 | Electron beam apparatus | Mamoru Nakasuji, Takeshi Murakami, Tohru Satake, Tsutomi Karimata, Toshifumi Kimba +4 more | 2011-11-29 |
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2011-11-08 |
| 8035082 | Projection electron beam apparatus and defect inspection system using the apparatus | Ichirota Nagahama | 2011-10-11 |
| 8036445 | Pattern matching method, program and semiconductor device manufacturing method | Atsushi Onishi, Tadashi Mitsui | 2011-10-11 |
| 8000046 | Storage device, processor or storage device, and computer program product for providing parameter adjustment during read/write operations | — | 2011-08-16 |
| 7903264 | Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus | Kei Hayasaki, Toru Mikami, Shinichi Ito, Toshiya Kotani | 2011-03-08 |
| 7863580 | Electron beam apparatus and an aberration correction optical apparatus | Masahiro Hatakeyama, Takeshi Murakami, Nobuharu Noji, Mamoru Nakasuji, Hirosi Sobukawa +3 more | 2011-01-04 |