Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067732 | Electron beam apparatus | Mamoru Nakasuji, Takeshi Murakami, Tohru Satake, Tsutomi Karimata, Toshifumi Kimba +4 more | 2011-11-29 |
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2011-11-08 |
| 8035082 | Projection electron beam apparatus and defect inspection system using the apparatus | Yuichiro Yamazaki | 2011-10-11 |
| 7863580 | Electron beam apparatus and an aberration correction optical apparatus | Masahiro Hatakeyama, Takeshi Murakami, Nobuharu Noji, Mamoru Nakasuji, Hirosi Sobukawa +3 more | 2011-01-04 |