Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076654 | Sample surface inspection apparatus and method | Masahiro Hatakeyama, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji | 2011-12-13 |
| 8067732 | Electron beam apparatus | Mamoru Nakasuji, Takeshi Murakami, Tsutomi Karimata, Toshifumi Kimba, Matsutaro Miyamoto +4 more | 2011-11-29 |
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2011-11-08 |
| 7928378 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji, Takeshi Murakami +6 more | 2011-04-19 |
| 7888642 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nabuharu Noji, Masahiro Hatakeyama, Kenji Watanabe, Takao Kato +7 more | 2011-02-15 |