Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067732 | Electron beam apparatus | Takeshi Murakami, Tohru Satake, Tsutomi Karimata, Toshifumi Kimba, Matsutaro Miyamoto +4 more | 2011-11-29 |
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2011-11-08 |
| 7928378 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2011-04-19 |
| 7888642 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Nabuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe, Takao Kato +7 more | 2011-02-15 |
| 7863580 | Electron beam apparatus and an aberration correction optical apparatus | Masahiro Hatakeyama, Takeshi Murakami, Nobuharu Noji, Hirosi Sobukawa, Satoshi Mori +3 more | 2011-01-04 |