Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8067732 | Electron beam apparatus | Mamoru Nakasuji, Takeshi Murakami, Tohru Satake, Tsutomi Karimata, Matsutaro Miyamoto +4 more | 2011-11-29 |
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Hirosi Sobukawa +9 more | 2011-11-08 |
| 8045142 | Polishing end point detection method, polishing end point detection apparatus and polishing apparatus | — | 2011-10-25 |
| 7964844 | Sample inspection apparatus | — | 2011-06-21 |
| 7928378 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji, Takeshi Murakami +6 more | 2011-04-19 |
| 7888642 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nabuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe +7 more | 2011-02-15 |