Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076654 | Sample surface inspection apparatus and method | Kenji Watanabe, Takeshi Murakami, Tohru Satake, Nobuharu Noji | 2011-12-13 |
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2011-11-08 |
| 8013315 | Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same | Kenji Watanabe, Takeshi Murakami, Ryo Tajima, Masatoshi Tsuneoka, Nobuharu Noji | 2011-09-06 |
| 7952071 | Apparatus and method for inspecting sample surface | Nobuharu Noji, Yoshihiko Naito, Hirosi Sobukawa, Kenji Terao, Takeshi Murakami +2 more | 2011-05-31 |
| 7928382 | Detector and inspecting apparatus | Shoji Yoshikawa, Kenichi Suematsu, Tsutomu Karimata, Nobuharu Noji | 2011-04-19 |
| 7928378 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2011-04-19 |
| 7888642 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nabuharu Noji, Tohru Satake, Kenji Watanabe, Takao Kato +7 more | 2011-02-15 |
| 7863580 | Electron beam apparatus and an aberration correction optical apparatus | Takeshi Murakami, Nobuharu Noji, Mamoru Nakasuji, Hirosi Sobukawa, Satoshi Mori +3 more | 2011-01-04 |