Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8013315 | Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same | Kenji Watanabe, Takeshi Murakami, Ryo Tajima, Masahiro Hatakeyama, Nobuharu Noji | 2011-09-06 |
| 7983471 | Pattern inspection apparatus and method | Tadashi Kitamura, Toshiaki Hasebe | 2011-07-19 |