Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076654 | Sample surface inspection apparatus and method | Masahiro Hatakeyama, Kenji Watanabe, Takeshi Murakami, Tohru Satake | 2011-12-13 |
| 8053726 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2011-11-08 |
| 8013315 | Charged particle beam apparatus, method of adjusting astigmatism using same and method of manufacturing device using same | Kenji Watanabe, Takeshi Murakami, Ryo Tajima, Masahiro Hatakeyama, Masatoshi Tsuneoka | 2011-09-06 |
| 7952071 | Apparatus and method for inspecting sample surface | Yoshihiko Naito, Hirosi Sobukawa, Masahiro Hatakeyama, Kenji Terao, Takeshi Murakami +2 more | 2011-05-31 |
| 7928382 | Detector and inspecting apparatus | Masahiro Hatakeyama, Shoji Yoshikawa, Kenichi Suematsu, Tsutomu Karimata | 2011-04-19 |
| 7928378 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Takeshi Murakami +6 more | 2011-04-19 |
| 7863580 | Electron beam apparatus and an aberration correction optical apparatus | Masahiro Hatakeyama, Takeshi Murakami, Mamoru Nakasuji, Hirosi Sobukawa, Satoshi Mori +3 more | 2011-01-04 |