Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071157 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Tatsuhiko Ema, Rempei Nakata, Nobuhide Yamada, Katsuya Okumura | 2011-12-06 |
| 7972765 | Pattern forming method and a semiconductor device manufacturing method | Kenji Kawano, Tsuyoshi Shibata | 2011-07-05 |
| 7968272 | Semiconductor device manufacturing method to form resist pattern | Daisuke Kawamura, Eishi Shiobara, Tomoyuki Takeishi, Yasunobu Onishi, Shinichi Ito +1 more | 2011-06-28 |
| 7903264 | Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus | Toru Mikami, Shinichi Ito, Yuichiro Yamazaki, Toshiya Kotani | 2011-03-08 |