Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080429 | Evaluation method for chemical solution, qualification method for chemical solution and method for manufacturing semiconductor device | Shinichi Ito | 2011-12-20 |
| 7973907 | Method for treating substrate, method for conveying substrate, and apparatus for conveying substrate | Kentaro Matsunaga, Daisuke Kawamura, Seiro Miyoshi | 2011-07-05 |
| 7968272 | Semiconductor device manufacturing method to form resist pattern | Daisuke Kawamura, Tomoyuki Takeishi, Kei Hayasaki, Yasunobu Onishi, Shinichi Ito +1 more | 2011-06-28 |