Issued Patents 2011
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080429 | Evaluation method for chemical solution, qualification method for chemical solution and method for manufacturing semiconductor device | Eishi Shiobara | 2011-12-20 |
| 8071157 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Tatsuhiko Ema, Kei Hayasaki, Rempei Nakata, Nobuhide Yamada, Katsuya Okumura | 2011-12-06 |
| 7988147 | Sheet conveying apparatus | — | 2011-08-02 |
| 7982120 | Performance apparatus and storage medium therefor | Michihiko Sasaki, Gou Usui | 2011-07-19 |
| 7968272 | Semiconductor device manufacturing method to form resist pattern | Daisuke Kawamura, Eishi Shiobara, Tomoyuki Takeishi, Kei Hayasaki, Yasunobu Onishi +1 more | 2011-06-28 |
| 7956274 | Performance apparatus and storage medium therefor | Michihiko Sasaki, Gou Usui | 2011-06-07 |
| 7918753 | Hydraulic control unit | Akira Murakami, Makoto Funahashi, Toshihiro Aoyama, Michio Yoshida, Ryuji Ibaraki +2 more | 2011-04-05 |
| 7907250 | Immersion lithography method | — | 2011-03-15 |
| D633986 | Pressure regulator | Michihiro Hanada | 2011-03-08 |
| 7903264 | Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus | Kei Hayasaki, Toru Mikami, Yuichiro Yamazaki, Toshiya Kotani | 2011-03-08 |
| 7902701 | Automotive alternator | Shinji Nishimura, Atsushi Hirokado | 2011-03-08 |
| D632362 | Pressure regulator | Michihiro Hanada | 2011-02-08 |