Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071157 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Tatsuhiko Ema, Kei Hayasaki, Rempei Nakata, Nobuhide Yamada | 2011-12-06 |
| 8021062 | Developing apparatus and developing method | Takanori Nishi, Takahiro Kitano | 2011-09-20 |
| 7994443 | Switch array | Masato Hayashi, Masami Yakabe, Tetsuya Hasebe, Muneo Harada | 2011-08-09 |
| 7988429 | Chemical liquid supply system | Shigenobu Itoh, Tetsuya Toyoda, Kazuhiro Sugata | 2011-08-02 |
| 7980611 | Substrate holding apparatus, substrate transferring robot equipped with the same, and semiconductor production apparatus | Hideharu Zenpo, Hideo Yamamoto, Toshiyuki Harada, Yoshihiro Kusama | 2011-07-19 |
| 7952071 | Apparatus and method for inspecting sample surface | Nobuharu Noji, Yoshihiko Naito, Hirosi Sobukawa, Masahiro Hatakeyama, Kenji Terao +2 more | 2011-05-31 |
| 7942647 | Pump for supplying chemical liquids | Shigenobu Itoh, Kazuhiro Sugata, Kazuhiro Arakawa | 2011-05-17 |
| 7922862 | Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method | Shinji Himori, Kazuya Nagaseki, Hiroki Matsumaru, Shoichiro Matsuyama, Toshiki Takahashi | 2011-04-12 |
| 7862959 | Transfer mask for exposure and pattern exchanging method of the same | Kazuya Nagaseki, Naoyuki Satoh | 2011-01-04 |