Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7980611 | Substrate holding apparatus, substrate transferring robot equipped with the same, and semiconductor production apparatus | Hideharu Zenpo, Hideo Yamamoto, Toshiyuki Harada, Katsuya Okumura | 2011-07-19 |
| 7950890 | Vacuum robot, vacuum motor for vacuum robot, and production method of said vacuum motor | Takayuki Nakamura, Tadataka Noguchi | 2011-05-31 |