Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7980611 | Substrate holding apparatus, substrate transferring robot equipped with the same, and semiconductor production apparatus | Hideharu Zenpo, Hideo Yamamoto, Yoshihiro Kusama, Katsuya Okumura | 2011-07-19 |