Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071157 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Tatsuhiko Ema, Kei Hayasaki, Rempei Nakata, Katsuya Okumura | 2011-12-06 |
| 8008190 | Method of manufacturing semiconductor device | Hideto Matsuyama, Hideshi Miyajima | 2011-08-30 |
| 7999356 | Composition for film formation, insulating film, semiconductor device, and process for producing the semiconductor device | Yasushi Nakasaki, Miyoko Shimada, Hideshi Miyajima, Kei Watanabe | 2011-08-16 |
| 7902036 | Method of fabricating semiconductor device and the semiconductor device | — | 2011-03-08 |