Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7922862 | Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method | Katsuya Okumura, Shinji Himori, Hiroki Matsumaru, Shoichiro Matsuyama, Toshiki Takahashi | 2011-04-12 |
| 7862959 | Transfer mask for exposure and pattern exchanging method of the same | Katsuya Okumura, Naoyuki Satoh | 2011-01-04 |