Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7922862 | Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method | Katsuya Okumura, Shinji Himori, Kazuya Nagaseki, Hiroki Matsumaru, Toshiki Takahashi | 2011-04-12 |