Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7867926 | Substrate processing apparatus and method | Takeshi Tamura, Hiroyuki Ide, Manabu Hama | 2011-01-11 |
| 7862959 | Transfer mask for exposure and pattern exchanging method of the same | Katsuya Okumura, Kazuya Nagaseki | 2011-01-04 |