Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985685 | Method of manufacturing semiconductor device | Yukiteru Matsui, Masako Kinoshita, Yoshikuni Tateyama, Takeshi Nishioka, Hiroyuki Yano | 2011-07-26 |
| 7973907 | Method for treating substrate, method for conveying substrate, and apparatus for conveying substrate | Kentaro Matsunaga, Daisuke Kawamura, Eishi Shiobara | 2011-07-05 |