Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8078306 | Polishing apparatus and polishing method | Hidetaka Nakao, Eisaku Hayashi, Kunio Oishi, Isao Hayakawa, Yoshiaki Miyake +1 more | 2011-12-13 |
| 7985685 | Method of manufacturing semiconductor device | Yukiteru Matsui, Masako Kinoshita, Seiro Miyoshi, Takeshi Nishioka, Hiroyuki Yano | 2011-07-26 |
| 7951717 | Post-CMP treating liquid and manufacturing method of semiconductor device using the same | Nobuyuki Kurashima, Gaku Minamihaba, Hiroyuki Yano | 2011-05-31 |
| 7888139 | Fabricating method of nonvolatile semiconductor storage apparatus | Yukiteru Matsui, Takeo Kubota, Hiroyuki Kanaya, Yoshihiro Minami | 2011-02-15 |
| 7883394 | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method | Tetsuji Togawa, Toshio Watanabe, Hiroyuki Yano, Gen Toyota, Kenji Iwade | 2011-02-08 |