Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083571 | Polishing apparatus | Osamu Nabeya, Makoto Fukushima | 2011-12-27 |
| 8070560 | Polishing apparatus and method | Hozumi Yasuda, Makoto Fukushima | 2011-12-06 |
| 7988537 | Substrate holding apparatus and polishing apparatus | Hiroshi Yoshida, Osamu Nabeya, Makoto Fukushima, Koichi Fukaya | 2011-08-02 |
| 7967665 | Substrate holding apparatus, polishing apparatus, and polishing method | Hozumi Yasuda, Osamu Nabeya, Kenichiro Saito, Makoto Fukushima, Tomoshi Inoue | 2011-06-28 |
| D634719 | Elastic membrane for semiconductor wafer polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Makoto Fukushima, Osamu Nabeya, Koji Saito +3 more | 2011-03-22 |
| 7883394 | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method | Toshio Watanabe, Hiroyuki Yano, Gen Toyota, Kenji Iwade, Yoshikuni Tateyama | 2011-02-08 |
| 7867063 | Substrate holding apparatus and polishing apparatus | Hiroshi Yoshida, Osamu Nabeya, Makoto Fukushima, Koichi Fukaya | 2011-01-11 |