Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7988537 | Substrate holding apparatus and polishing apparatus | Tetsuji Togawa, Hiroshi Yoshida, Osamu Nabeya, Makoto Fukushima | 2011-08-02 |
| 7867063 | Substrate holding apparatus and polishing apparatus | Tetsuji Togawa, Hiroshi Yoshida, Osamu Nabeya, Makoto Fukushima | 2011-01-11 |