Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083571 | Polishing apparatus | Tetsuji Togawa, Makoto Fukushima | 2011-12-27 |
| 7988537 | Substrate holding apparatus and polishing apparatus | Tetsuji Togawa, Hiroshi Yoshida, Makoto Fukushima, Koichi Fukaya | 2011-08-02 |
| 7967665 | Substrate holding apparatus, polishing apparatus, and polishing method | Hozumi Yasuda, Tetsuji Togawa, Kenichiro Saito, Makoto Fukushima, Tomoshi Inoue | 2011-06-28 |
| D634719 | Elastic membrane for semiconductor wafer polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Makoto Fukushima, Koji Saito, Satoru Yamaki +3 more | 2011-03-22 |
| D633452 | Elastic membrane for semiconductor wafer polishing apparatus | Keisuke Namiki, Hozumi Yasuda, Makoto Fukushima, Shingo Togashi, Satoru Yamaki +1 more | 2011-03-01 |
| 7867063 | Substrate holding apparatus and polishing apparatus | Tetsuji Togawa, Hiroshi Yoshida, Makoto Fukushima, Koichi Fukaya | 2011-01-11 |