Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7967665 | Substrate holding apparatus, polishing apparatus, and polishing method | Hozumi Yasuda, Tetsuji Togawa, Osamu Nabeya, Kenichiro Saito, Makoto Fukushima | 2011-06-28 |
| D634719 | Elastic membrane for semiconductor wafer polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Makoto Fukushima, Osamu Nabeya, Koji Saito +3 more | 2011-03-22 |