Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070560 | Polishing apparatus and method | Makoto Fukushima, Tetsuji Togawa | 2011-12-06 |
| 7967665 | Substrate holding apparatus, polishing apparatus, and polishing method | Tetsuji Togawa, Osamu Nabeya, Kenichiro Saito, Makoto Fukushima, Tomoshi Inoue | 2011-06-28 |
| D634719 | Elastic membrane for semiconductor wafer polishing apparatus | Keisuke Namiki, Makoto Fukushima, Osamu Nabeya, Koji Saito, Satoru Yamaki +3 more | 2011-03-22 |
| 7897007 | Substrate holding apparatus and substrate polishing apparatus | Yoshihiro Gunji, Keisuke Namiki, Hiroshi Yoshida | 2011-03-01 |
| D633452 | Elastic membrane for semiconductor wafer polishing apparatus | Keisuke Namiki, Osamu Nabeya, Makoto Fukushima, Shingo Togashi, Satoru Yamaki +1 more | 2011-03-01 |