Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7897007 | Substrate holding apparatus and substrate polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Hiroshi Yoshida | 2011-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7897007 | Substrate holding apparatus and substrate polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Hiroshi Yoshida | 2011-03-01 |