Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7967665 | Substrate holding apparatus, polishing apparatus, and polishing method | Hozumi Yasuda, Tetsuji Togawa, Osamu Nabeya, Makoto Fukushima, Tomoshi Inoue | 2011-06-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7967665 | Substrate holding apparatus, polishing apparatus, and polishing method | Hozumi Yasuda, Tetsuji Togawa, Osamu Nabeya, Makoto Fukushima, Tomoshi Inoue | 2011-06-28 |