Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7883394 | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method | Tetsuji Togawa, Toshio Watanabe, Hiroyuki Yano, Gen Toyota, Yoshikuni Tateyama | 2011-02-08 |