Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8078306 | Polishing apparatus and polishing method | Eisaku Hayashi, Kunio Oishi, Isao Hayakawa, Yoshiaki Miyake, Yoshikuni Tateyama +1 more | 2011-12-13 |
| 8038136 | Hand having rocking mechanism and substrate delivering device having the same | Hiroki SANEMASA, Hideo Yamamoto, Naoomi Torii, Takahiro Ogawa, Seiji Katsuoka +1 more | 2011-10-18 |