Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8038136 | Hand having rocking mechanism and substrate delivering device having the same | Hiroki SANEMASA, Hideo Yamamoto, Naoomi Torii, Takahiro Ogawa, Hidetaka Nakao +1 more | 2011-10-18 |
| 7976362 | Substrate polishing apparatus and method | Masahiko Sekimoto, Junji Kunisawa, Mitsuru Miyazaki, Teruyuki Watanabe, Kenichi Kobayashi +2 more | 2011-07-12 |
| 7959977 | Substrate processing method and apparatus | Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Kobayashi +2 more | 2011-06-14 |
| 7886685 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Masahiko Sekimoto, Naoki Dai, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Suzuki +3 more | 2011-02-15 |