Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070237 | Brake control method and system | Helge Westerfeld, Markus Hamm | 2011-12-06 |
| 8038136 | Hand having rocking mechanism and substrate delivering device having the same | Hiroki SANEMASA, Hideo Yamamoto, Naoomi Torii, Seiji Katsuoka, Hidetaka Nakao +1 more | 2011-10-18 |
| 7959977 | Substrate processing method and apparatus | Seiji Katsuoka, Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Kenichi Kobayashi +2 more | 2011-06-14 |
| 7938130 | Substrate holding rotating mechanism, and substrate processing apparatus | Hiroyuki Kaneko, Kenichi Sugita | 2011-05-10 |
| 7886685 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Masahiko Sekimoto, Seiji Katsuoka, Naoki Dai, Teruyuki Watanabe, Kenichi Suzuki +3 more | 2011-02-15 |